The Development of Micromachined Gyroscope Structure and Circuitry Technology

The Development of Micromachined Gyroscope Structure and Circuitry Technology

This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized...

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Bibliographic Details
Main Authors: Dunzhu Xia, Cheng Yu, Lun Kong
Format: Article
Language:English
Published: MDPI AG 2014-01-01
Series:Sensors
Subjects:
micromachined/micro gyroscopes
gyroscope structure
gyroscope circuitry
Coriolis effect
Sagnac effect
gyroscope review
Online Access:http://www.mdpi.com/1424-8220/14/1/1394

Internet

http://www.mdpi.com/1424-8220/14/1/1394

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