A Novel Method to Grow Vertically Aligned Silicon Nanowires on Si (111) and Their Optical Absorption
In this study we grew silicon nanowires (SiNWs) on Si (111) substrate by gold-catalyzed vapor liquid solid (VLS) process using tetrachlorosilane (SiCl4) in a hot-wall chemical vapor deposition reactor. SiNWs with 150–200 nm diameters were found to grow along the orientations of all 〈111〉 family, inc...
Main Authors: | Tzuen-Wei Ho, Franklin Chau-Nan Hong |
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Format: | Article |
Language: | English |
Published: |
Hindawi Limited
2012-01-01
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Series: | Journal of Nanomaterials |
Online Access: | http://dx.doi.org/10.1155/2012/274618 |
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