UV Sensitivity of MOS Structures with Silicon Nanoclusters

UV Sensitivity of MOS Structures with Silicon Nanoclusters

Selective UV sensitivity was observed in Metal-Oxide-Semiconductor structures with Si nanoclusters. Si nanocrystals and amorphous Si nanoparticles (a-Si NPs) were obtained by furnace annealing of SiO<sub>x</sub> films with x = 1.15 for 60 min in N<sub>2</sub> at 1000 and 700...

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Bibliographic Details
Main Authors: Mario Curiel, Nicola Nedev, Judith Paz, Oscar Perez, Benjamin Valdez, David Mateos, Abraham Arias, Diana Nesheva, Emil Manolov, Roumen Nedev, Valeri Dzhurkov
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Sensors
Subjects:
UV
selective sensitivity
MOS
Si nanoclusters
Online Access:https://www.mdpi.com/1424-8220/19/10/2277

Internet

https://www.mdpi.com/1424-8220/19/10/2277

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