Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth
This paper presents the design, fabrication, and characterization of a highly sensitive, single drive multi-axis gyroscope. The multi-axis gyroscope allows for a wide bandwidth in all three axes (X, Y, Z) and exhibits high linearity. The fabricated multi-axis gyroscope was fabricated with a structur...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-06-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/6/410 |