A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film
Silicon oxynitride (SiN<i><sub>x</sub></i>O<i><sub>y</sub></i>) is a highly promising functional material for its luminescence performance and tunable refractive index, which has wide applications in optical devices, non-volatile memory, barrier layer,...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-08-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/8/552 |