Tuning the Doping Ratio and Phase Transition Temperature of VO<sub>2</sub> Thin Film by Dual-Target Co-Sputtering

Tuning the Doping Ratio and Phase Transition Temperature of VO<sub>2</sub> Thin Film by Dual-Target Co-Sputtering

A new simple way for tuning the phase transition temperature (PTT) of VO<sub>2</sub> thin films has been proposed to solve the problem of changing the doping ratio by using the dual-target co-sputtering method. A series of samples with W doping ratios of 0%, 0.5%, 1%, 1.5% and 2% have be...

Full description

Bibliographic Details
Main Authors: Xu Chen, Mingfei Wu, Xingxing Liu, Ding Wang, Feng Liu, Yuwei Chen, Fei Yi, Wanxia Huang, Shaowei Wang
Format: Article
Language:English
Published: MDPI AG 2019-06-01
Series:Nanomaterials
Subjects:
VO<sub>2</sub>
thin films
doping
co-sputtering
phase transition
Online Access:https://www.mdpi.com/2079-4991/9/6/834

Internet

https://www.mdpi.com/2079-4991/9/6/834

Similar Items