Broadband Mirrors in the Near-Infrared Based on Subwavelength Gratings in SOI
We describe the design, fabrication, and characterization of high-reflectivity broadband mirrors operating in the near-infrared (700-1000 nm) wavelength range. The mirrors consist of 1-D and 2-D subwavelength resonant gratings (SWGs) fabricated on a silicon-on-insulator (SOI) wafer. A very good agre...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2010-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/5512548/ |