Dynamic Characteristics of Micro-Beams Considering the Effect of Flexible Supports

Dynamic Characteristics of Micro-Beams Considering the Effect of Flexible Supports

Normally, the boundaries are assumed to allow small deflections and moments for MEMS beams with flexible supports. The non-ideal boundary conditions have a significant effect on the qualitative dynamical behavior. In this paper, by employing the principle of energy equivalence, rigorous theoretical...

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Bibliographic Details
Main Authors: Zuo-Yang Zhong, Wen-Ming Zhang, Guang Meng
Format: Article
Language:English
Published: MDPI AG 2013-11-01
Series:Sensors
Subjects:
equivalent stiffness
flexible supports
micro-beams
resonance frequency shift
dynamics
Online Access:http://www.mdpi.com/1424-8220/13/12/15880

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http://www.mdpi.com/1424-8220/13/12/15880

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