Effect of Substrate Temperature on the Thermoelectric Properties of the Sb2Te3 Thin Films Deposition by Using Thermal Evaporation Method
The antimony-telluride (Sb2Te3) thermoelectric thin films were prepared on SiO2/Si substrates by thermal evaporation method. The substrate temperature that ranged from room temperature to 150°C was adopted to deposit the Sb2Te3 thin films. The effects of substrate temperature on the microstructures...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Hindawi Limited
2015-01-01
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Series: | Journal of Nanomaterials |
Online Access: | http://dx.doi.org/10.1155/2015/135130 |