Is the Ne operation of the helium ion microscope suitable for electron backscatter diffraction sample preparation?
Electron backscatter diffraction (EBSD) is a powerful characterization technique which allows the study of microstructure, grain size, and orientation as well as strain of a crystallographic sample. In addition, the technique can be used for phase analysis. A mirror-flat sample surface is required f...
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| Format: | Article |
| Language: | English |
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Beilstein-Institut
2021-08-01
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| Series: | Beilstein Journal of Nanotechnology |
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| Online Access: | https://doi.org/10.3762/bjnano.12.73 |