Fabrication of an Au–Au/carbon nanotube-composite contacts RF-MEMS switch

Fabrication of an Au–Au/carbon nanotube-composite contacts RF-MEMS switch

Abstract This study aims to propose a new fabrication method for an ohmic contact type RF-MEMS switch with Au–Au/carbon nanotube (CNT)-composite contacts. These contacts are proposed to improve the reliability and the high-power handling capability of the ohmic contact type RF-MEMS switch. During th...

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Bibliographic Details
Main Authors: Tomoaki Kageyama, Koichi Shinozaki, Lan Zhang, Jian Lu, Hideki Takaki, Sang-Seok Lee
Format: Article
Language:English
Published: SpringerOpen 2018-11-01
Series:Micro and Nano Systems Letters
Subjects:
RF-MEMS switch
Au/CNT-composite layer
Reliability
Ar IBE process optimization
Online Access:http://link.springer.com/article/10.1186/s40486-018-0068-z

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http://link.springer.com/article/10.1186/s40486-018-0068-z

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