Thermo Optical Phase Shifter With Low Thermal Crosstalk for SOI Strip Waveguide
The trade-offs of using thermo-optical phase shifter in different standard CMOS silicon-on-insulator (SOI) structures (strip and rib waveguides) are studied. Twelve different thermo-optic phase shifters, considering metal and highly doped silicon (both n- and p-type), are studied using numerical sim...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9345963/ |