Axial Error of Spindle Measurements Using a High-Frequency-Modulated Interferometer
In this paper, a novel, compact, and high-precision axial error measurement using a frequency-modulated interferometer is developed. Normally, heterodyne interferometers are a powerful system for small displacement measurements due to their property of being less sensitive to temperature and pressur...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-07-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/11/7/801 |