Optimal and Robust Design Method for Two-Chip Out-of-Plane Microaccelerometers

Optimal and Robust Design Method for Two-Chip Out-of-Plane Microaccelerometers

In this paper, an optimal and robust design method to implement a two-chip out-of-plane microaccelerometer system is presented. The two-chip microsystem consists of a MEMS chip for sensing the external acceleration and a CMOS chip for signal processing. An optimized design method to determine the de...

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Bibliographic Details
Main Authors: Hyoungho Ko, Byoungdoo Choi, Dong-il Dan Cho, Sangmin Lee
Format: Article
Language:English
Published: MDPI AG 2010-11-01
Series:Sensors
Subjects:
design optimization
out-of-plane microaccelerometer
Extended Sacrificial Bulk Micromachining (ESBM) process
CMOS capacitive readout circuit
Online Access:http://www.mdpi.com/1424-8220/10/12/10524/

Internet

http://www.mdpi.com/1424-8220/10/12/10524/

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