Bartsch, H., Grieseler, R., Mánuel, J., Pezoldt, J., & Müller, J. (2018). Magnetron Sputtered AlN Layers on LTCC Multilayer and Silicon Substrates. MDPI AG.
Chicago Style (17th ed.) CitationBartsch, Heike, Rolf Grieseler, Jose Mánuel, Jörg Pezoldt, and Jens Müller. Magnetron Sputtered AlN Layers on LTCC Multilayer and Silicon Substrates. MDPI AG, 2018.
MLA (8th ed.) CitationBartsch, Heike, et al. Magnetron Sputtered AlN Layers on LTCC Multilayer and Silicon Substrates. MDPI AG, 2018.
Warning: These citations may not always be 100% accurate.