A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization

A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization

CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical performance otherwise achieved by specific technologies,...

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Bibliographic Details
Main Authors: Rafel Perelló-Roig, Jaume Verd, Sebastià Bota, Jaume Segura
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Micromachines
Subjects:
transimpedance amplifier
RF MEMS
oscillator
CMOS-MEMS
Online Access:https://www.mdpi.com/2072-666X/12/1/82

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https://www.mdpi.com/2072-666X/12/1/82

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