A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope
The helium ion microscope has emerged as a multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has ext...
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| Format: | Article |
| Language: | English |
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Beilstein-Institut
2021-07-01
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| Series: | Beilstein Journal of Nanotechnology |
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| Online Access: | https://doi.org/10.3762/bjnano.12.52 |