Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance

The LC resonator-based passive pressure sensor attracts much attention because it does not need a power source or lead wires between the sensing element and the readout system. This paper presents the design and manufacturing of a passive pressure sensor that contains a variable capacitor and a copp...

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Bibliographic Details
Main Authors: Cheng Zheng, Wei Li, An-Lin Li, Zhan Zhan, Ling-Yun Wang, Dao-Heng Sun
Format: Article
Language:English
Published: MDPI AG 2016-05-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/7/5/87