Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance
The LC resonator-based passive pressure sensor attracts much attention because it does not need a power source or lead wires between the sensing element and the readout system. This paper presents the design and manufacturing of a passive pressure sensor that contains a variable capacitor and a copp...
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doaj-4e8489ff779e415599aa5e9204ac3a172020-11-24T23:41:25ZengMDPI AGMicromachines2072-666X2016-05-01758710.3390/mi7050087mi7050087Design and Manufacturing of a Passive Pressure Sensor Based on LC ResonanceCheng Zheng0Wei Li1An-Lin Li2Zhan Zhan3Ling-Yun Wang4Dao-Heng Sun5Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, ChinaDepartment of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, ChinaDepartment of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, ChinaDepartment of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, ChinaDepartment of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, ChinaDepartment of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, ChinaThe LC resonator-based passive pressure sensor attracts much attention because it does not need a power source or lead wires between the sensing element and the readout system. This paper presents the design and manufacturing of a passive pressure sensor that contains a variable capacitor and a copper-electroplated planar inductor. The sensor is fabricated using silicon bulk micro-machining, electroplating, and anodic bonding technology. The finite element method is used to model the deflection of the silicon diaphragm and extract the capacitance change corresponding to the applied pressure. Within the measurement range from 5 to 100 kPa, the sensitivity of the sensor is 0.052 MHz/kPa, the linearity is 2.79%, and the hysteresis error is 0.2%. Compared with the sensitivity at 27 °C, the drop of output performance is 3.53% at 140 °C.http://www.mdpi.com/2072-666X/7/5/87pressure sensorLC resonancewireless |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Cheng Zheng Wei Li An-Lin Li Zhan Zhan Ling-Yun Wang Dao-Heng Sun |
spellingShingle |
Cheng Zheng Wei Li An-Lin Li Zhan Zhan Ling-Yun Wang Dao-Heng Sun Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance Micromachines pressure sensor LC resonance wireless |
author_facet |
Cheng Zheng Wei Li An-Lin Li Zhan Zhan Ling-Yun Wang Dao-Heng Sun |
author_sort |
Cheng Zheng |
title |
Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance |
title_short |
Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance |
title_full |
Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance |
title_fullStr |
Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance |
title_full_unstemmed |
Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance |
title_sort |
design and manufacturing of a passive pressure sensor based on lc resonance |
publisher |
MDPI AG |
series |
Micromachines |
issn |
2072-666X |
publishDate |
2016-05-01 |
description |
The LC resonator-based passive pressure sensor attracts much attention because it does not need a power source or lead wires between the sensing element and the readout system. This paper presents the design and manufacturing of a passive pressure sensor that contains a variable capacitor and a copper-electroplated planar inductor. The sensor is fabricated using silicon bulk micro-machining, electroplating, and anodic bonding technology. The finite element method is used to model the deflection of the silicon diaphragm and extract the capacitance change corresponding to the applied pressure. Within the measurement range from 5 to 100 kPa, the sensitivity of the sensor is 0.052 MHz/kPa, the linearity is 2.79%, and the hysteresis error is 0.2%. Compared with the sensitivity at 27 °C, the drop of output performance is 3.53% at 140 °C. |
topic |
pressure sensor LC resonance wireless |
url |
http://www.mdpi.com/2072-666X/7/5/87 |
work_keys_str_mv |
AT chengzheng designandmanufacturingofapassivepressuresensorbasedonlcresonance AT weili designandmanufacturingofapassivepressuresensorbasedonlcresonance AT anlinli designandmanufacturingofapassivepressuresensorbasedonlcresonance AT zhanzhan designandmanufacturingofapassivepressuresensorbasedonlcresonance AT lingyunwang designandmanufacturingofapassivepressuresensorbasedonlcresonance AT daohengsun designandmanufacturingofapassivepressuresensorbasedonlcresonance |
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