The Investigation of High-Temperature SAW Oxygen Sensor Based on ZnO Films
In this paper, a wireless oxygen sensor based on a surface acoustic wave (SAW) was reported. For high-temperature applications, novel Al<sub>2</sub>O<sub>3</sub>/ZnO/Pt multilayered conductive film was deposited on langasite substrate as the electrodes, and ZnO film obtained...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-04-01
|
| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/12/8/1235 |