Study of optical sensors of the form Al/a-SiC:H/c-Si(n) with high sensitivity.
In the present work optical sensors of the form Al/a-SiC:H/c-Si(n), for different thickness of a-SiC:H thin films are stud-ied. More specifically, a-SiC:H thin films were deposited by rf sputtering technique on c-Si(n) substrates for different thickness of the amorphous semiconductor and, subsequent...
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| Format: | Article |
| Language: | English |
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Eastern Macedonia and Thrace Institute of Technology
2008-06-01
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| Series: | Journal of Engineering Science and Technology Review |
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| Online Access: | http://www.jestr.org/downloads/volume1/fulltext9.pdf |