Realization of electrically driven AlGaN micropillar array deep-ultraviolet light emitting diodes at 286 nm
We report on the realization of top-down fabricated, electrically driven, deep-ultraviolet (DUV) AlGaN micropillar array light emitting diodes (LEDs) with high output power density. Ordered arrays of micropillars with the inverse-taper profile were formed from an AlGaN epitaxial stack (epistack) usi...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0061381 |