Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing

Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing

In this manuscript, we outline a reliable procedure to manufacture photonic nanostructures from single-crystal diamond (SCD). Photonic nanostructures, in our case SCD nanopillars on thin (&lt;1 <inline-formula> <math display="inline"> <semantics> <mi mathvariant=&q...

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Bibliographic Details
Main Authors: Mariusz Radtke, Richard Nelz, Abdallah Slablab, Elke Neu
Format: Article
Language:English
Published: MDPI AG 2019-10-01
Series:Micromachines
Subjects:
top-down nanofabrication
single-crystal diamond
hsq
electron beam lithography
inductively coupled-reactive ion etching (icp-rie)
Online Access:https://www.mdpi.com/2072-666X/10/11/718

Internet

https://www.mdpi.com/2072-666X/10/11/718

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