Crystallization and electrical conversion behavior of Ge1Sb9/HfO2 superlattice-like phase change films

Crystallization and electrical conversion behavior of Ge1Sb9/HfO2 superlattice-like phase change films

This paper focused the effect of the recombination of HfO2 on the phase change behavior and crystalline properties of Ge1Sb9/HfO2 superlattice-like phase change films. Compared with pure Ge1Sb9, the Ge1Sb9/HfO2 superlattice-like film has higher crystallization temperature, better data retention abil...

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Bibliographic Details
Main Authors: Junbo Xu, Yifeng Hu, Xiaoqin Zhu
Format: Article
Language:English
Published: Elsevier 2021-10-01
Series:Materials & Design
Subjects:
Phase change memory
Superlattice-like films
Ge1Sb9/HfO2
Thermal stability
Low power consumption
Online Access:http://www.sciencedirect.com/science/article/pii/S0264127521004664

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http://www.sciencedirect.com/science/article/pii/S0264127521004664

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