Flatness Improvement of Double-Sided Magnetic Film for Narrow Gap Electromagnetic Energy Harvester

Flatness Improvement of Double-Sided Magnetic Film for Narrow Gap Electromagnetic Energy Harvester

This paper reports the design, modeling and preliminary fabrication result of the flatness improved magnetic film on a silicon structure for narrow-gap electromagnetic (EMG) vibration energy harvester (VEH). The harvester has double-sided corrugated shape silicon vibration mass with 15 µm-thick NdFe...

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Bibliographic Details
Main Authors: Takayuki Fujita, Shinichi Yoshii, Ryosuke Nakanishi, Kensuke Kanda, Kazusuke Maenaka
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Proceedings
Subjects:
MEMS
energy harvester
magnetic type
NdFeB sputtering
residual stress
Online Access:https://www.mdpi.com/2504-3900/2/13/1043

Internet

https://www.mdpi.com/2504-3900/2/13/1043

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