Low-field emission of electrons by thin metal films: effect of composition, deposition conditions and morphology on emission capability of a film
The paper presents experimental study of the phenomenon of low-threshold field electron emission from thin films of several metals: Mo, W, Zr, Ni and Ti. We used magnetron sputtering with variable process parameters to deposit films of various thicknesses on silicon substrates of different types. A...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Peter the Great St.Petersburg Polytechnic University
2021-03-01
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| Series: | St. Petersburg Polytechnical University Journal: Physics and Mathematics |
| Subjects: | |
| Online Access: | https://physmath.spbstu.ru/article/2021.51.08/ |