Fabrication and Optical Characterization of Silicon Nanostructure Arrays by Laser Interference Lithography and Metal-Assisted Chemical Etching
In this paper metal-assisted chemical etching has been applied to pattern porous silicon regions and silicon nanohole arrays in submicron period simply by using positive photoresist as a mask layer. In order to define silicon nanostructures, Metal-assisted chemical etching (MaCE) was carried out wit...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nanoscience and Nanotechnology Research Center, University of Kashan
2014-10-01
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| Series: | Journal of Nanostructures |
| Subjects: | |
| Online Access: | http://jns.kashanu.ac.ir/article_8485_b493122d45d6a4429f54621186c4ca46.pdf |