A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function

A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function

Sigma-delta (ΣΔ) closed-loop operation is the best candidate for realizing the interface circuit of MEMS accelerometers. However, stability and reliability problems are still the main obstacles hindering its further development for high-end applications. In situ self-testing and...

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Bibliographic Details
Main Authors: Dongliang Chen, Xiaowei Liu, Liang Yin, Yinhang Wang, Zhaohe Shi, Guorui Zhang
Format: Article
Language:English
Published: MDPI AG 2018-09-01
Series:Micromachines
Subjects:
MEMS accelerometer
electromechanical delta-sigma
built-in self-test
in situ self-testing
digital resonator
Online Access:http://www.mdpi.com/2072-666X/9/9/444

Internet

http://www.mdpi.com/2072-666X/9/9/444

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