Determining Contact Angle and Surface Energy of Co60Fe20B20 Thin Films by Magnetron Sputtering

This study examined the deposition of CoFeB thin films on a glass substrate at room temperature (RT), as well as the effects of conducting postannealing at heat annealing TA=150°C for 1 h. The thickness (tf) of the CoFeB thin films ranged from 100 Å to 500 Å. The microstructure, average contact angl...

Full description

Bibliographic Details
Main Authors: S. K. Wang, Yuan-Tsung Chen, S. R. Jian
Format: Article
Language:English
Published: Hindawi Limited 2011-01-01
Series:Journal of Nanomaterials
Online Access:http://dx.doi.org/10.1155/2011/291935