Direct Defect-Level Analysis of Metal–Insulator–Metal Capacitor Using Internal Photoemission Spectroscopy
Barrier height (<inline-formula> <tex-math notation="LaTeX">$\phi _{b}$ </tex-math></inline-formula>), trap state, bandgap (<inline-formula> <tex-math notation="LaTeX">$E_{g}$ </tex-math></inline-formula>), and band alignment inform...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9404305/ |