Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering

Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering

Characterization of local order in thin films is challenging with pair distribution function (PDF) analysis because of the minute mass of the scattering material. Here, it is demonstrated that reliable high-energy grazing-incidence total X-ray scattering data can be obtained in situ during thin-film...

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Bibliographic Details
Main Authors: Martin Roelsgaard, Ann-Christin Dippel, Kasper Andersen Borup, Ida Gjerlevsen Nielsen, Nils Lau Nyborg Broge, Jan Torben Röh, Olof Gutowski, Bo Brummerstedt Iversen
Format: Article
Language:English
Published: International Union of Crystallography 2019-03-01
Series:IUCrJ
Subjects:
pair distribution function
thin films
grazing-incidence PDF
magnetron sputtering
Online Access:http://scripts.iucr.org/cgi-bin/paper?S2052252519001192

Internet

http://scripts.iucr.org/cgi-bin/paper?S2052252519001192

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