Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering
Characterization of local order in thin films is challenging with pair distribution function (PDF) analysis because of the minute mass of the scattering material. Here, it is demonstrated that reliable high-energy grazing-incidence total X-ray scattering data can be obtained in situ during thin-film...
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doaj-51f70b1a530f43e7ace14be25e197d8e2020-11-25T02:50:35ZengInternational Union of CrystallographyIUCrJ2052-25252019-03-016229930410.1107/S2052252519001192fc5030Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputteringMartin Roelsgaard0Ann-Christin Dippel1Kasper Andersen Borup2Ida Gjerlevsen Nielsen3Nils Lau Nyborg Broge4Jan Torben Röh5Olof Gutowski6Bo Brummerstedt Iversen7Center for Materials Crystallography, Department of Chemistry, Aarhus University, Aarhus, DenmarkPETRA III, Deutsches Elektronen-Synchrotron, DESY, Hamburg, GermanyCenter for Materials Crystallography, Department of Chemistry, Aarhus University, Aarhus, DenmarkCenter for Materials Crystallography, Department of Chemistry, Aarhus University, Aarhus, DenmarkCenter for Materials Crystallography, Department of Chemistry, Aarhus University, Aarhus, DenmarkPETRA III, Deutsches Elektronen-Synchrotron, DESY, Hamburg, GermanyPETRA III, Deutsches Elektronen-Synchrotron, DESY, Hamburg, GermanyCenter for Materials Crystallography, Department of Chemistry, Aarhus University, Aarhus, DenmarkCharacterization of local order in thin films is challenging with pair distribution function (PDF) analysis because of the minute mass of the scattering material. Here, it is demonstrated that reliable high-energy grazing-incidence total X-ray scattering data can be obtained in situ during thin-film deposition by radio-frequency magnetron sputtering. A benchmark system of Pt was investigated in a novel sputtering chamber mounted on beamline P07-EH2 at the PETRA III synchrotron. Robust and high-quality PDFs can be obtained from films as thin as 3 nm and atomistic modelling of the PDFs with a time resolution of 0.5 s is possible. In this way, it was found that a polycrystalline Pt thin film deposits with random orientation at 8 W and 2 × 10−2 mbar at room temperature. From the PDF it was found that the coherent-scattering domains grow with time. While the first layers are formed with a small tensile strain this relaxes towards the bulk value with increasing film thickness.http://scripts.iucr.org/cgi-bin/paper?S2052252519001192pair distribution functionthin filmsgrazing-incidence PDFmagnetron sputtering |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Martin Roelsgaard Ann-Christin Dippel Kasper Andersen Borup Ida Gjerlevsen Nielsen Nils Lau Nyborg Broge Jan Torben Röh Olof Gutowski Bo Brummerstedt Iversen |
spellingShingle |
Martin Roelsgaard Ann-Christin Dippel Kasper Andersen Borup Ida Gjerlevsen Nielsen Nils Lau Nyborg Broge Jan Torben Röh Olof Gutowski Bo Brummerstedt Iversen Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering IUCrJ pair distribution function thin films grazing-incidence PDF magnetron sputtering |
author_facet |
Martin Roelsgaard Ann-Christin Dippel Kasper Andersen Borup Ida Gjerlevsen Nielsen Nils Lau Nyborg Broge Jan Torben Röh Olof Gutowski Bo Brummerstedt Iversen |
author_sort |
Martin Roelsgaard |
title |
Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering |
title_short |
Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering |
title_full |
Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering |
title_fullStr |
Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering |
title_full_unstemmed |
Time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering |
title_sort |
time-resolved grazing-incidence pair distribution functions during deposition by radio-frequency magnetron sputtering |
publisher |
International Union of Crystallography |
series |
IUCrJ |
issn |
2052-2525 |
publishDate |
2019-03-01 |
description |
Characterization of local order in thin films is challenging with pair distribution function (PDF) analysis because of the minute mass of the scattering material. Here, it is demonstrated that reliable high-energy grazing-incidence total X-ray scattering data can be obtained in situ during thin-film deposition by radio-frequency magnetron sputtering. A benchmark system of Pt was investigated in a novel sputtering chamber mounted on beamline P07-EH2 at the PETRA III synchrotron. Robust and high-quality PDFs can be obtained from films as thin as 3 nm and atomistic modelling of the PDFs with a time resolution of 0.5 s is possible. In this way, it was found that a polycrystalline Pt thin film deposits with random orientation at 8 W and 2 × 10−2 mbar at room temperature. From the PDF it was found that the coherent-scattering domains grow with time. While the first layers are formed with a small tensile strain this relaxes towards the bulk value with increasing film thickness. |
topic |
pair distribution function thin films grazing-incidence PDF magnetron sputtering |
url |
http://scripts.iucr.org/cgi-bin/paper?S2052252519001192 |
work_keys_str_mv |
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