Auto-Split Laser Lift-Off Technique for Vertical-Injection GaN-Based Green Light-Emitting Diodes

An auto-split laser lift-off (LLO) method for fabrication of vertical-injection GaN-based green light-emitting diodes (ASV-LEDs) is demonstrated. The ASV-LEDs exhibited a significant improvement in the light output and thermal dissipation, as compared with that of conventional LEDs on sapphire. The...

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Bibliographic Details
Main Authors: M. Chen, B. P. Zhang, L. E. Cai, J. Y. Zhang, L. Y. Ying, X. Q. Lv
Format: Article
Language:English
Published: IEEE 2013-01-01
Series:IEEE Photonics Journal
Subjects:
GaN
Online Access:https://ieeexplore.ieee.org/document/6568967/