Structural And Optical Properties Of VOx Thin Films
VOx thin films were deposited on Corning glass, fused silica and Ti foils by means of rf reactive sputtering from a metallic vanadium target. Argon-oxygen gas mixtures of different compositions controlled by the flow rates were used for sputtering. Influence of the oxygen partial pressure in the spu...
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| Format: | Article |
| Language: | English |
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Polish Academy of Sciences
2015-06-01
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| Series: | Archives of Metallurgy and Materials |
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| Online Access: | http://www.degruyter.com/view/j/amm.2015.60.issue-2/amm-2015-0238/amm-2015-0238.xml?format=INT |