Understanding interferometry for micro-cantilever displacement detection
Interferometric displacement detection in a cantilever-based non-contact atomic force microscope (NC-AFM) operated in ultra-high vacuum is demonstrated for the Michelson and Fabry–Pérot modes of operation. Each mode is addressed by appropriately adjusting the distance between the fiber end deliverin...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2016-06-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.7.76 |