Crystallization of Amorphous Silicon via Excimer Laser Annealing and Evaluation of Its Passivation Properties

Crystallization of Amorphous Silicon via Excimer Laser Annealing and Evaluation of Its Passivation Properties

The crystallization of hydrogenated amorphous silicon (a-Si:H) is essential for improving solar cell efficiency. In this study, we analyzed the crystallization of a-Si:H via excimer laser annealing (ELA) and compared this process with conventional thermal annealing. ELA prevents thermal damage to th...

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Bibliographic Details
Main Authors: Sanchari Chowdhury, Jinsu Park, Jaemin Kim, Sehyeon Kim, Youngkuk Kim, Eun-Chel Cho, Younghyun Cho, Junsin Yi
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Energies
Subjects:
crystallinity
thermal annealing
excimer laser annealing
passivation
amorphous hydrogenated silicon film
Online Access:https://www.mdpi.com/1996-1073/13/13/3335

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https://www.mdpi.com/1996-1073/13/13/3335

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