Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes

Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes

Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the d...

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Bibliographic Details
Main Authors: Mehmet Ozdogan, Shahrzad Towfighian
Format: Article
Language:English
Published: MDPI AG 2016-03-01
Series:Micromachines
Subjects:
MEMS micro-mirror
sidewall electrodes
bi-axial mirror
softening behavior
nonlinear dynamics
secondary resonances
Online Access:http://www.mdpi.com/2072-666X/7/3/42

Internet

http://www.mdpi.com/2072-666X/7/3/42

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