Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror

Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror

In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph actuators symmetrically located at the four sides...

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Bibliographic Details
Main Authors: Hao Zhang, Dacheng Xu, Xiaoyang Zhang, Qiao Chen, Huikai Xie, Suiqiong Li
Format: Article
Language:English
Published: MDPI AG 2015-12-01
Series:Sensors
Subjects:
electrothermal actuator
MEMS mirror
static deviation
model based open-loop control
Online Access:http://www.mdpi.com/1424-8220/15/12/29840

Internet

http://www.mdpi.com/1424-8220/15/12/29840

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