FABRICATION OF PhC STRUCTURES BY USING NANOIMPRINT LITHOGRAPHY AND THEIR OPTICAL PROPERTIES
The contribution deals with creating structure, which have unique properties for influencing the spectrum of light. Since these structures exhibit the period under the diffraction limit of visible light or UV radiation, they can’t be fabricated by standard photolithography. As a result, this nanosca...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Scientific Route OÜ
2019-11-01
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| Series: | Technology Transfer: Fundamental Principles and Innovative Technical Solutions |
| Subjects: | |
| Online Access: | http://eu-jr.eu/ttfpits/article/view/1020 |