Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition
The ability of electrons and atomic hydrogen (AH) to remove residual chlorine from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated. Auger electron spectroscopy (AES) and energy-dispersive X-ray spectroscopy (EDS) measurements as well as the...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2017-11-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.8.240 |