Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition

The ability of electrons and atomic hydrogen (AH) to remove residual chlorine from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated. Auger electron spectroscopy (AES) and energy-dispersive X-ray spectroscopy (EDS) measurements as well as the...

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Bibliographic Details
Main Authors: Julie A. Spencer, Michael Barclay, Miranda J. Gallagher, Robert Winkler, Ilyas Unlu, Yung-Chien Wu, Harald Plank, Lisa McElwee-White, D. Howard Fairbrother
Format: Article
Language:English
Published: Beilstein-Institut 2017-11-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.8.240