A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS
In this paper, a finite element (FE) procedure for modeling electrostatically actu-ated MEMS is presented. It concerns a perturbation method for computing electrostatic fielddistortions due to moving conductors. The computation is split in two steps. First, an un-perturbed problem (in the absence of...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2008-02-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/8/2/994/ |