Temperature effects on the mechanical reliability of MEMS structures: experimental study on creep and thermal fatigue

Bibliographic Details
Main Authors: Brusa E., Somà A., De Pasquale G.
Format: Article
Language:English
Published: EDP Sciences 2010-06-01
Series:EPJ Web of Conferences
Online Access:http://dx.doi.org/10.1051/epjconf/20100606001