Temperature effects on the mechanical reliability of MEMS structures: experimental study on creep and thermal fatigue

Temperature effects on the mechanical reliability of MEMS structures: experimental study on creep and thermal fatigue

Bibliographic Details
Main Authors:	Brusa E., Somà A., De Pasquale G.
Format:	Article
Language:	English
Published:	EDP Sciences 2010-06-01
Series:	EPJ Web of Conferences
Online Access:	http://dx.doi.org/10.1051/epjconf/20100606001

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