Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroics
The present paper pertains to mechanical properties and structure of nanocrystalline multiferroic BeFiO3 (BFO) thin films, grown by atomic layer deposition (ALD) on the Si/SiO2/Pt substrate. The usage of sharp-tip-nanoindentation and multiple techniques of structure examination, namely, grazing inci...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Hindawi Limited
2016-01-01
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Series: | Journal of Nanomaterials |
Online Access: | http://dx.doi.org/10.1155/2016/5348471 |