Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroics
The present paper pertains to mechanical properties and structure of nanocrystalline multiferroic BeFiO3 (BFO) thin films, grown by atomic layer deposition (ALD) on the Si/SiO2/Pt substrate. The usage of sharp-tip-nanoindentation and multiple techniques of structure examination, namely, grazing inci...
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doaj-547ad45140de43a29132b1f17df4a3d12020-11-24T22:13:53ZengHindawi LimitedJournal of Nanomaterials1687-41101687-41292016-01-01201610.1155/2016/53484715348471Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 MultiferroicsAnna Majtyka0Anna Nowak1Benoît Marchand2Dariusz Chrobak3Mikko Ritala4Jyrki Räisänen5Roman Nowak6Nordic Hysitron Laboratory, Department of Materials Science and Engineering, Aalto University, 00076 Espoo, FinlandA. Chelkowski Institute of Physics, University of Silesia, Uniwersytecka 4, 40-007 Katowice, PolandDepartment of Physics, University of Helsinki, P.O. Box 43, 00014 Helsinki, FinlandInstitute of Material Sciences, University of Silesia, 75 Pulku Piechoty 1A, 41-500 Chorzow, PolandDepartment of Chemistry, Laboratory of Inorganic Chemistry, University of Helsinki, P.O. Box 55, 00014 Helsinki, FinlandDepartment of Physics, University of Helsinki, P.O. Box 43, 00014 Helsinki, FinlandNordic Hysitron Laboratory, Department of Materials Science and Engineering, Aalto University, 00076 Espoo, FinlandThe present paper pertains to mechanical properties and structure of nanocrystalline multiferroic BeFiO3 (BFO) thin films, grown by atomic layer deposition (ALD) on the Si/SiO2/Pt substrate. The usage of sharp-tip-nanoindentation and multiple techniques of structure examination, namely, grazing incidence X-ray diffraction, X-ray photoelectron spectroscopy, scanning electron microscopy, and energy dispersive X-ray spectrometry, enabled us to detect changes in elastic properties (95 GPa≤E≤118 GPa) and hardness (4.50 GPa≤H≤7.96 GPa) of BFO after stages of annealing and observe their relation to the material’s structural evolution. Our experiments point towards an increase in structural homogeneity of the samples annealed for a longer time. To our best knowledge, the present report constitutes the first disclosure of nanoindentation mechanical characteristics of ALD-fabricated BeFiO3, providing a new insight into the phenomena that accompany structure formation and development of nanocrystalline multiferroics. We believe that our systematic characterization of the BFO layers carried out at consecutive stages of their deposition provides pertinent information which is needed to control and optimize its ALD fabrication.http://dx.doi.org/10.1155/2016/5348471 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Anna Majtyka Anna Nowak Benoît Marchand Dariusz Chrobak Mikko Ritala Jyrki Räisänen Roman Nowak |
spellingShingle |
Anna Majtyka Anna Nowak Benoît Marchand Dariusz Chrobak Mikko Ritala Jyrki Räisänen Roman Nowak Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroics Journal of Nanomaterials |
author_facet |
Anna Majtyka Anna Nowak Benoît Marchand Dariusz Chrobak Mikko Ritala Jyrki Räisänen Roman Nowak |
author_sort |
Anna Majtyka |
title |
Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroics |
title_short |
Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroics |
title_full |
Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroics |
title_fullStr |
Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroics |
title_full_unstemmed |
Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroics |
title_sort |
structure-dependent mechanical properties of ald-grown nanocrystalline bifeo3 multiferroics |
publisher |
Hindawi Limited |
series |
Journal of Nanomaterials |
issn |
1687-4110 1687-4129 |
publishDate |
2016-01-01 |
description |
The present paper pertains to mechanical properties and structure of nanocrystalline multiferroic BeFiO3 (BFO) thin films, grown by atomic layer deposition (ALD) on the Si/SiO2/Pt substrate. The usage of sharp-tip-nanoindentation and multiple techniques of structure examination, namely, grazing incidence X-ray diffraction, X-ray photoelectron spectroscopy, scanning electron microscopy, and energy dispersive X-ray spectrometry, enabled us to detect changes in elastic properties (95 GPa≤E≤118 GPa) and hardness (4.50 GPa≤H≤7.96 GPa) of BFO after stages of annealing and observe their relation to the material’s structural evolution. Our experiments point towards an increase in structural homogeneity of the samples annealed for a longer time. To our best knowledge, the present report constitutes the first disclosure of nanoindentation mechanical characteristics of ALD-fabricated BeFiO3, providing a new insight into the phenomena that accompany structure formation and development of nanocrystalline multiferroics. We believe that our systematic characterization of the BFO layers carried out at consecutive stages of their deposition provides pertinent information which is needed to control and optimize its ALD fabrication. |
url |
http://dx.doi.org/10.1155/2016/5348471 |
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