The estimation of possibility of the using gas mixer for obtaining sharper MOCVD grown heterojunctions
In this paper, we investigate the possibility of using gas mixer precursor for MOCVD to get sharper heterojunctions InxGa1-xAs, InxGa1-xAs и InxAl1-xAs. Nanolayers of that compositions are using in creations of quantum well devices like avalanche photodiode, QWIPs and so on.This devices needs sharp...
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| Format: | Article |
| Language: | Russian |
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MIREA - Russian Technological University
2014-08-01
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| Series: | Тонкие химические технологии |
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| Online Access: | https://www.finechem-mirea.ru/jour/article/view/455 |