Scatterometer and Intensity Distribution Meter With Screen Image Synthesis

A screen image synthesis (SIS) system is superior than the conventional methods in terms of high-speed measurement and low screen-cross-talk noise when used as a whole-field light-distribution meter. However, reflection signals cannot be measured using the conventional SIS system when it is used as...

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Bibliographic Details
Main Authors: Yeh-Wei Yu, Tsung-Hsun Yang, Ching-Cherng Sun, Yun-Hsuan Lin, Ming Le, Chih-Wei Chen, Po-Kai Hsieh, X. H. Lee
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9209040/