Investigation of Sensory Properties of Nanostructure Tin Oxide Layers Deposited by Thermal Evaporation and Sputtering Methods Compared to Ethanol
In this paper, manufacturing and evaluation of ethanol gas sensors based on thin films of nanostructure tin oxide have been investigated. SnO2 thin films were prepared by both thermal evaporation (type I) and sputtering (type II) methods and heat treated on silicon wafer substrates. Scanning electro...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | fas |
| Published: |
Isfahan University of Technology
2015-03-01
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| Series: | Journal of Advanced Materials in Engineering |
| Subjects: | |
| Online Access: | http://jame.iut.ac.ir/article-1-580-en.html |