Surface Study of Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub>-Based Electrical Probe Memory for Educational Archival Storage

Surface roughness that is an inherent character of deposited films determines contact resistance at layer interfaces and thus may play a critical role in write and readout operations of phase-change electrical probe memory comprising multiple stacked layers. The surface roughness of different layere...

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Bibliographic Details
Main Author: Li-Zhi Xie
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8698325/