Surface Study of Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub>-Based Electrical Probe Memory for Educational Archival Storage
Surface roughness that is an inherent character of deposited films determines contact resistance at layer interfaces and thus may play a critical role in write and readout operations of phase-change electrical probe memory comprising multiple stacked layers. The surface roughness of different layere...
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Format: | Article |
Language: | English |
Published: |
IEEE
2019-01-01
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Series: | IEEE Access |
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Online Access: | https://ieeexplore.ieee.org/document/8698325/ |