Modelling and Design of MEMS Piezoresistive Out-of-Plane Shear and Normal Stress Sensors
In this paper, the design of MEMS piezoresistive out-of-plane shear and normal stress sensor is described. To improve the sensor sensitivity, a methodology by the incorporation of stress concentration regions, namely surface trenches in the proximity of sensing elements was explored in detail. The f...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/18/11/3737 |